US Patent 11837486 Reticle transportation container
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US Patent 11837486 Reticle transportation container
Article
Patent abstract
A transportation container is provided with a container body constructed of a top wall, a bottom wall, a rear wall, and two sidewalls forming a front opening for loading or unloading a reticle pod into or out of the container body; a lid for opening and closing the front opening; and a lift plate above the container body configured to connect to a carrier of an overhead hoist transfer (OHT) system.
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Patent Jurisdiction
Patent Number
Patent Inventor Names
Yu-Ching Lee0
Yu-Piao Fang0
Date of Patent
December 5, 2023
0Patent Application Number
172323260
Date Filed
April 16, 2021
0Patent Primary Examiner
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