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US Patent 11837486 Reticle transportation container

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
April 16, 2021
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Date of Patent
December 5, 2023
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Patent Application Number
17232326
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Patent Citations
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US Patent 8944739 Loadport bridge for semiconductor fabrication tools
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Patent Inventor Names
Yu-Piao Fang
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Yu-Ching Lee
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11837486
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Patent Primary Examiner
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Saul Rodriguez
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CPC Code
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H01L 21/67772
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H01L 21/67373
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H01L 21/67383
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H01L 21/6773
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H01L 21/67386
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H01L 21/67379
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H01L 21/67359
0

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