US Patent 11842917 Process kit ring adaptor
Patent 11842917 was granted and assigned to Applied Materials on December, 2023 by the United States Patent and Trademark Office.
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US Patent 11842917 Process kit ring adaptor
Article
Patent abstract
A process kit ring adaptor includes one or more upper surfaces and one or more lower surfaces. The one or more upper surfaces are configured to support a process kit ring. The one or more lower surfaces are configured to interface with an end effector. The process kit ring adaptor supporting the process kit ring is configured to be transported on the end effector within a processing system.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Andreas Schmid0
Damon K. Cox0
Denis Martin Koosau0
Douglas R. McAllister0
Helder Lee0
Jeffrey Hudgens0
Leon Volfovski0
Nicholas Michael Kopec0
Steven Babayan0
Date of Patent
December 12, 2023
0Patent Application Number
172164390
Date Filed
March 29, 2021
0Patent Citations
Patent Primary Examiner
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