Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Hans-Gerd Fuss0
Date of Patent
December 26, 2023
0Patent Application Number
166289850
Date Filed
July 3, 2018
0Patent Citations
Patent Primary Examiner
Patent abstract
A device, for depositing a layer on a substrate by supplying one or more process gases to a process chamber, includes a susceptor and one or more transmitter coils. The susceptor bearing the substrate can be heated to a process temperature by means of an electromagnetic alternating field generated by the one or more transmitter coils. The one or more transmitter coils have a coating that consists of tin and nickel in order to provide a corrosion-resistant coating, which simultaneously has low emissivity and is therefore effective in the presence of chlorine compounds and moisture.
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