Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Morgan Evans0
Thomas James Soldi0
Joseph C. Olson0
Maurice Emerson Peploski0
Rutger Meyer Timmerman Thijssen0
Date of Patent
December 26, 2023
0Patent Application Number
171473380
Date Filed
January 12, 2021
0Patent Citations
Patent Primary Examiner
CPC Code
Patent abstract
A method is provided. The method includes exposing a first material disposed across a first plane on a first substrate to an ion beam to form a first plurality of structures in the first material, the ion beam directed at the first material at an ion beam angle ϑ relative to a surface normal of the first substrate. The first substrate is positioned at a first rotation angle ϕ
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