Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
David Marquardt0
Mohith Verghese0
Carl White0
Jose Alexandro Romero0
Date of Patent
January 2, 2024
0Patent Application Number
181455530
Date Filed
December 22, 2022
0Patent Citations
...
Patent Primary Examiner
CPC Code
Patent abstract
Ampoules for a semiconductor manufacturing precursors and methods of use are described. The ampoules include a container with an inlet port and an outlet port. The ampoules comprise an inlet plenum located between the inlet port and the cavity and an outlet plenum located between the outlet port and the cavity. A flow path is defined by a plurality of tubular walls and an ingress openings of the ampoule, through which a carrier gas flows in contact with the precursor.
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