Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Kyle Fondurulia0
Carl L. White0
Eric Shero0
Mohith E. Verghese0
Date of Patent
March 24, 2015
0Patent Application Number
127630370
Date Filed
April 19, 2010
0Patent Citations Received
Patent Primary Examiner
Patent abstract
A precursor source vessel for providing vaporized precursor to a reaction chamber is provided. The precursor source vessel includes a lid having a first port, a second port, and a third port. The precursor source vessel also includes a base removably attached to the lid. The base includes a recessed region formed therein. One of the first, second, and third ports is a burp port configured to relieve the head pressure within the source vessel after the source vessel is installed but prior to use of the source vessel in semiconductor processing.
Timeline
No Timeline data yet.
Further Resources
No Further Resources data yet.