Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Mohith E. Verghese
Eric James Shero
Carl Louis White
Kyle Fondurulia
Timothy James Sullivan
Date of Patent
October 3, 2023
Patent Application Number
18163144
Date Filed
February 1, 2023
Patent Citations
...
Patent Primary Examiner
Patent abstract
Herein disclosed are systems and methods related to solid source chemical sublimator vessels and corresponding deposition modules. The solid source chemical sublimator can include a housing configured to hold solid chemical reactant therein. A lid may be disposed on a proximal portion of the housing. The lid can include a fluid inlet and a fluid outlet and define a serpentine flow path within a distal portion of the lid. The lid can be adapted to allow gas flow within the flow path. The solid source chemical sublimator can include a filter that is disposed between the serpentine flow path and the distal portion of the housing. The filter can have a porosity configured to restrict a passage of a solid chemical reactant therethrough.
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