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US Patent 11773486 Solid source sublimator

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
Date Filed
February 1, 2023
Date of Patent
October 3, 2023
Patent Application Number
18163144
Patent Citations
‌
US Patent 7270709 Method and apparatus of generating PDMAT precursor
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US Patent 7278887 Integrated filter connector
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US Patent 7413767 Gas supply method in a CVD coating system for precursors with a low vapor pressure
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US Patent 7437060 Delivery systems for efficient vaporization of precursor source material
‌
US Patent 7497420 Safe liquid source containers
‌
US Patent 7531090 Fluid filter element
‌
US Patent 7730747 Method for vaporizing a liquid reactant in manufacturing a glass preform
‌
US Patent 7763115 Vacuum film-forming apparatus
‌
US Patent 7815737 Source for thermal physical vapor deposition of organic electroluminescent layers
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US Patent 7833353 Liquid material vaporization apparatus for semiconductor processing apparatus
•••
Patent Inventor Names
Mohith E. Verghese
Eric James Shero
Carl Louis White
Kyle Fondurulia
Timothy James Sullivan
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
Patent Number
11773486
Patent Primary Examiner
‌
Mounir S Amer
CPC Code
‌
H01L 21/67115
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H01L 21/67103
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H01L 21/67098

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