US Patent 11867166 Piezoelectric pump with annular valve arrangement
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US Patent 11867166 Piezoelectric pump with annular valve arrangement
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Patent abstract
A piezoelectric pump includes a first top board, a second top board, a diaphragm, a first side wall, a second side wall, a first valve, and a second valve. The first valve has an annular shape to surround the first aperture while being spaced apart from the first aperture and the second aperture, and is disposed in the first pump chamber between the first aperture and the second aperture when viewed in a plan. The second valve has an annular shape to surround the third aperture while being spaced apart from the third aperture and the fourth aperture, and is disposed in the second pump chamber between the third aperture and the fourth aperture when viewed in a plan.
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Patent Number
Patent Inventor Names
Masaaki Fujisaki0
Nobuhira Tanaka0
Date of Patent
January 9, 2024
0Patent Application Number
173653230
Date Filed
July 1, 2021
0Patent Citations
Patent Primary Examiner
CPC Code
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