US Patent 11870202 Solid-state power amplifiers with cooling capabilities
Patent 11870202 was granted and assigned to Applied Materials on January, 2024 by the United States Patent and Trademark Office.
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US Patent 11870202 Solid-state power amplifiers with cooling capabilities
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Patent abstract
Methods and apparatus for processing a substrate. For example, a processing chamber can include a power source, an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume, and a cooling plate configured to receive a coolant to cool the amplifier during operation.
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Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ananthkrishna Jupudi0
Lean Wui Koh0
Prashant Agarwal0
Rajesh Kumar Putti0
Vinodh Ramachandran0
Date of Patent
January 9, 2024
0Patent Application Number
170098510
Date Filed
September 2, 2020
0Patent Primary Examiner
CPC Code
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