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US Patent 11873916 Fluid control device, fluid supply system, and fluid supply method

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Kouji Nishino0

Toshihide Yoshida0

Masahiko Takimoto0

Tsutomu Shinohara0

Date of Patent

January 16, 2024

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Patent Application Number

180032590

Date Filed

June 15, 2021

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Patent Citations

US Patent 8944095 Gas supply apparatus for semiconductor manufacturing apparatus

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US Patent 9400004 Transient measurements of mass flow controllers

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US Patent 9952078 Upstream volume mass flow verification systems and methods

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US Patent 10031005 Method and apparatus for self verification of pressure-based mass flow controllers

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US Patent 10031004 Methods and apparatus for wide range mass flow verification

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US Patent 10126761 Gas insensitive mass flow control systems and methods

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US Patent 8019481 Flow rate ratio control device

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US Patent 8793082 Upstream volume mass flow verification systems and methods

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Patent Primary Examiner

William M McCalister

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CPC Code

0

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Patent abstract

A fluid control device

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