Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Tao Ding0
Joseph R. Monkowski0
Adam J. Monkowski0
Jialing Chen0
Date of Patent
July 26, 2016
Patent Application Number
13306940
Date Filed
November 29, 2011
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus to measure the transient response of a mass flow controller (MFC). The size of a variable orifice, upstream of the MFC, is controlled such that the pressure between the orifice and the MFC is held constant during the entire time that the MFC is going through its transient response. The known relationship between the size of the orifice and the flow through it allows a determination of the transient response of the MFC.
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