US Patent 9400004 Transient measurements of mass flow controllers
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Patent abstract
An apparatus to measure the transient response of a mass flow controller (MFC). The size of a variable orifice, upstream of the MFC, is controlled such that the pressure between the orifice and the MFC is held constant during the entire time that the MFC is going through its transient response. The known relationship between the size of the orifice and the flow through it allows a determination of the transient response of the MFC.
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Patent Inventor Names
Adam J. Monkowski0
Jialing Chen0
Joseph R. Monkowski0
Tao Ding0
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US Patent 09400004 Transient measurements of mass flow controllers US Patent 9400004 Transient measurements of mass flow controllers
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Patent Number
09400004
Patent Number
9400004
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US Patent 09400004 Transient measurements of mass flow controllers
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Is a
Patent jurisdiction
Patent number
09400004
Date of patent
July 26, 2016
Patent application number
13306940
Date Filed
November 29, 2011
Patent primary examiner
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