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US Patent 11876124 Vertical transistor having an oxygen-blocking layer
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Patent
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Date Filed
July 7, 2022
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Date of Patent
January 16, 2024
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Patent Application Number
17811129
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Patent Citations
US Patent 7683428 Vertical Fin-FET MOS devices
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US Patent 11476346 Vertical transistor having an oxygen-blocking top spacer
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Patent Inventor Names
Shahab Siddiqui
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Ruilong Xie
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Christopher J. Waskiewicz
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Chen Zhang
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11876124
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Patent Primary Examiner
Mark V. Prenty
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CPC Code
H01L 29/7827
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H01L 29/66666
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