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US Patent 11888064 Semiconductor device and method
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Patent
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Date Filed
June 1, 2020
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Date of Patent
January 30, 2024
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Patent Application Number
16889028
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Patent Citations
US Patent 9236300 Contact plugs in SRAM cells and the method of forming the same
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US Patent 9312354 Contact etch stop layers of a field effect transistor
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US Patent 9406804 FinFETs with contact-all-around
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US Patent 9443769 Wrap-around contact
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US Patent 9520482 Method of cutting metal gate
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US Patent 9548366 Self aligned contact scheme
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US Patent 9576814 Method of spacer patterning to form a target integrated circuit pattern
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US Patent 9831183 Contact structure and method of forming
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US Patent 9859386 Self aligned contact scheme
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US Patent 10164053 Semiconductor device and method
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•••
Patent Inventor Names
Guan-Ren Wang
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Ching-Feng Fu
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Yu-Lien Huang
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11888064
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Patent Primary Examiner
Bac H Au
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CPC Code
H01L 21/823431
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H01L 21/823821
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H01L 29/66795
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H01L 21/823475
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H01L 29/41791
0
H01L 21/823418
0
H01L 21/823871
0
H01L 29/7848
0
H01L 21/823814
0
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