Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Aaron Gawlik0
Reza Saeidpourazar0
Jairo T. Moura0
Date of Patent
February 20, 2024
0Patent Application Number
180456740
Date Filed
October 11, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
A substrate transport apparatus auto-teach system for auto-teaching a substrate station location, the system including a frame, a substrate transport connected to the frame, the substrate transport having an end effector configured to support a substrate, and a controller configured to move the substrate transport so that the substrate transport biases the substrate supported on the end effector against a substrate station feature causing a change in eccentricity between the substrate and the end effector, determine the change in eccentricity, and determine the substrate station location based on at least the change in eccentricity between the substrate and the end effector.
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