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US Patent 11909376 Piezo-actuated MEMS resonator

Patent 11909376 was granted and assigned to SiTime on February, 2024 by the United States Patent and Trademark Office.

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Current Assignee
SiTime
SiTime
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Date Filed
December 8, 2020
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Date of Patent
February 20, 2024
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Patent Applicant
SiTime
SiTime
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Patent Application Number
17115441
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Patent Citations
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US Patent 7443258 Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating same
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US Patent 7202761 Temperature compensation for silicon MEMS resonator
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US Patent 7369003 Oscillator system having a plurality of microelectromechanical resonators and method of designing, controlling or operating the same
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US Patent 7369004 Microelectromechanical oscillator and method of operating same
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US Patent 7800282 Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof
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US Patent 7843284 Lithographically defined multi-standard multi-frequency high-Q tunable micromechanical resonators
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US Patent 7888843 Thin-film piezoelectric-on-insulator resonators having perforated resonator bodies therein
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US Patent 7898158 MEMS vibrating structure using a single-crystal piezoelectric thin-film layer having domain inversions
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US Patent 7924119 Micromechanical bulk acoustic mode resonators having interdigitated electrodes and multiple pairs of anchor supports
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US Patent 7939990 Thin-film bulk acoustic resonators having perforated bodies that provide reduced susceptibility to process-induced lateral dimension variations
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•••
Patent Inventor Names
Charles I. Grosjean
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Ginel C. Hill
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Paul M. Hagelin
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Joseph C. Doll
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Nicholas Miller
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
11909376
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Patent Primary Examiner
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Emily P Pham
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CPC Code
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H03H 9/02448
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H03H 2009/155
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H03H 9/2452
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H03H 2003/027
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H03H 2009/02307
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H03H 9/02362
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