US Patent 11909376 Piezo-actuated MEMS resonator
Patent 11909376 was granted and assigned to SiTime on February, 2024 by the United States Patent and Trademark Office.
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US Patent 11909376 Piezo-actuated MEMS resonator
Article
Patent abstract
A microelectromechanical system (MEMS) resonator includes a degenerately-doped single-crystal silicon layer and a piezoelectric material layer disposed on the degenerately-doped single-crystal silicon layer. An electrically-conductive material layer is disposed on the piezoelectric material layer opposite the degenerately-doped single-crystal silicon layer, and patterned to form first and second electrodes.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Charles I. Grosjean0
Ginel C. Hill0
Joseph C. Doll0
Nicholas Miller0
Paul M. Hagelin0
Date of Patent
February 20, 2024
0Patent Application Number
171154410
Date Filed
December 8, 2020
0Patent Citations
Patent Primary Examiner
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