Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Dmitry Lubomirsky0
Peter Hillman0
Lala Zhu0
Dongqing Yang0
Soonam Park0
Mehmet Tugrul Samir0
Martin Yue Choy0
Date of Patent
February 27, 2024
0Patent Application Number
175839350
Date Filed
January 25, 2022
0Patent Citations
...
Patent Primary Examiner
Patent abstract
Exemplary support assemblies may include a top puck and a backing plate coupled with the top puck. The support assemblies may include a cooling plate coupled with the backing plate. The support assemblies may include a heater coupled between the cooling plate and the backing plate. The support assemblies may also include a back plate coupled with the backing plate about an exterior of the backing plate. The back plate may at least partially define a volume, and the heater and the cooling plate may be housed within the volume.
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