Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ruilong Xie0
Hui Zang0
Date of Patent
March 5, 2024
0Patent Application Number
178614500
Date Filed
July 11, 2022
0Patent Citations
Patent Primary Examiner
Patent abstract
The present disclosure relates to semiconductor structures and, more particularly, to a single diffusion cut for gate structures and methods of manufacture. The structure includes: a plurality of fin structures; a plurality of gate structures extending over the plurality of fin structures; a plurality of diffusion regions adjacent to the each of the plurality of gate structures; a single diffusion break between the diffusion regions of the adjacent gate structures; and a liner separating the single diffusion break from the diffusion regions.
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