Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Haruhiko Tan0
Ming Zeng0
Avish Ashok Bharwani0
Hajime Nakahara0
Date of Patent
March 12, 2024
0Patent Application Number
171342210
Date Filed
December 25, 2020
0Patent Citations
Patent Primary Examiner
Patent abstract
A robot according to one or more embodiments may include an arm and a hand. The hand is connected to the arm and supports to convey a wafer. The hand includes a base end portion that is an end of the side connected to an arm, and a distal end portion that is an end of the opposite side of the base end portion. With the hand, a lightened part is formed in at least a part of a first region which is a region of a distal end portion than the center part in the longitudinal direction of the hand.
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