Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yu-Syuan Cai0
Ken-Yu Chang0
Chia-Han Lai0
Chih-Wei Chang0
Min-Hsiu Hung0
Chun-I Tsai0
Chun-Hsien Huang0
Chen-Yuan Kao0
...
Date of Patent
March 12, 2024
0Patent Application Number
172000240
Date Filed
March 12, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
In some implementations, one or more semiconductor processing tools may form a metal cap on a metal gate. The one or more semiconductor processing tools may form one or more dielectric layers on the metal cap. The one or more semiconductor processing tools may form a recess to the metal cap within the one or more dielectric layers. The one or more semiconductor processing tools may perform a bottom-up deposition of metal material on the metal cap to form a metal plug within the recess and directly on the metal cap.
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