Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Denis M. Koosau0
Peter Muraoka0
Phillip A. Criminale0
Andrew Myles0
Date of Patent
March 19, 2024
0Patent Application Number
164075200
Date Filed
May 9, 2019
0Patent Citations
...
Patent Primary Examiner
Patent abstract
Apparatus and methods for calibrating a height-adjustable edge ring are described herein. In one example, a calibration jig for positioning an edge ring relative to a reference surface is provided that includes a transparent plate, a plurality of sensors coupled to a first side of the transparent plate, and a plurality of contact pads coupled to an opposing second side of the transparent plate.
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