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US Patent 8270141 Electrostatic chuck with reduced arcing

Patent 8270141 was granted and assigned to Applied Materials on September, 2012 by the United States Patent and Trademark Office.

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Is a

Patent

Patent attributes

Current Assignee

Applied Materials

Patent Jurisdiction

United States Patent and Trademark Office

Patent Number

82701410

Patent Inventor Names

David Palagashvili0

Michael D. Willwerth0

Michael G. Chafin0

Douglas A. Buchberger, Jr.0

Date of Patent

September 18, 2012

Patent Application Number

128849670

Date Filed

September 17, 2010

Patent Citations Received

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US Patent 12094752 Wafer edge ring lifting solution

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US Patent 11887879 In-situ apparatus for semiconductor process module

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US Patent 11935773 Calibration jig and calibration method

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US Patent 12009236 Sensors and system for in-situ edge ring erosion monitor

Patent Primary Examiner

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Patrick Salce

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