Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Chanro Park0
Ruilong Xie0
Julien Frougier0
Kangguo Cheng0
Veeraraghavan S. Basker0
Date of Patent
April 9, 2024
0Patent Application Number
173041120
Date Filed
June 15, 2021
0Patent Citations
...
Patent Primary Examiner
Patent abstract
An apparatus comprising a substrate and a thin gate oxide nanosheet device located on the substrate, having a first plurality of nanosheet layers, wherein each of the first plurality of nanosheet layers has a first thickness located at the center of the nanosheet. A thick gate oxide nanosheet device located on the substrate, having a second plurality of nanosheet layers, wherein each of the second plurality of nanosheet layers has a second thickness and wherein the first thickness is less than the second thickness.
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