US Patent 11960216 Invariable magnification multilevel optical device with telecentric converter
Patent 11960216 was granted and assigned to ASML Holding on April, 2024 by the United States Patent and Trademark Office.
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US Patent 11960216 Invariable magnification multilevel optical device with telecentric converter
Article
Patent abstract
A pre-alignment system includes a common object lens group configured to collect diffracted beams from a patterning device, wherein the common object lens group is further configured to produce telecentricity in an object space of the pre-alignment system. The pre-alignment system also includes a multipath sensory array having at least one image lens system, wherein the at least one image lens system includes a telecentric converter lens configured to produce telecentricity in an image space of the pre-alignment system.
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Lev Ryzhikov0
Yuli Vladimirsky0
Date of Patent
April 16, 2024
0Patent Application Number
176412120
Date Filed
August 25, 2020
0Patent Citations
Patent Primary Examiner
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