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US Patent 11977038 Inspection apparatus and inspection method
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Patent
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Date Filed
July 11, 2023
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Date of Patent
May 7, 2024
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Patent Application Number
18350221
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Patent Citations
US Patent 7916834 Small spot X-ray fluorescence (XRF) analyzer
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US Patent 10269536 Electron microscope
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US Patent 9213007 Foreign matter detector
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US Patent 11467107 X-ray analysis apparatus and x-ray generation unit
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US Patent 6850598 X-ray anode and process for its manufacture
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US Patent 7221731 X-ray microscopic inspection apparatus
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Patent Inventor Names
Takeo Tsukamoto
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
11977038
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Patent Primary Examiner
Don K Wong
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CPC Code
A61B 6/4241
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A61B 6/5205
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A61B 6/5282
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A61B 6/483
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A61B 6/4028
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G01N 2223/076
0
G01N 2223/079
0
G01N 2223/204
0
G01N 23/223
0
G01N 23/2252
0
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