Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Joseph AuBuchon0
Date of Patent
May 7, 2024
0Patent Application Number
175035990
Date Filed
October 18, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
Embodiments of the disclosure include methods of forming a film comprising conformally depositing a first film on a substrate; treating the first film with a first plasma to form a second film; treating the second film with a second plasma to form a third film; and selectively removing the first film, a portion of the second film, and the third film.
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