Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Matthew Spuller0
Gia Pham0
Kong Lung Samuel Chan0
Jau-Jiun Chen0
Preetham Rao0
Norman L. Tam0
Dongming Iu0
Kartik Shah0
...
Date of Patent
May 7, 2024
0Patent Application Number
159827850
Date Filed
May 17, 2018
0Patent Citations
Patent Primary Examiner
Patent abstract
Embodiments of the disclosure generally relate to a semiconductor processing chamber. In one embodiment, semiconductor processing chamber is disclosed and includes a chamber body having a bottom and a sidewall defining an interior volume, the sidewall having a substrate transfer port formed therein, and one or more absorber bodies positioned in the interior volume in a position opposite of the substrate transfer port.
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