Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Leon Volfovski0
Nir Merry0
Date of Patent
July 4, 2017
0Patent Application Number
144812830
Date Filed
September 9, 2014
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods and apparatus of substrate supports having temperature profile control are provided herein. In some embodiments, a substrate support includes: a plate having a substrate receiving surface and an opposite bottom surface; and a shaft having a first end comprising a shaft heater and a second end, wherein the first end is coupled to the bottom surface. Methods of making a substrate support having temperature profile control are also provided.
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