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US Patent 11994805 Method of operating semiconductor apparatus

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Shih-Ming Chang0

Ru-Gun Liu0

Chiu-Hsiang Chen0

Date of Patent

May 28, 2024

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Patent Application Number

181537080

Date Filed

January 12, 2023

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Patent Primary Examiner

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Patent abstract

A method of operating a semiconductor apparatus includes generating an air flow that flows from a covering structure; causing a photomask to move over the covering structure such that particles attached to the photomask are blown away from the photomask by the air flow; and irradiating the photomask with light through a light transmission region of the covering structure.

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