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US Patent 12000698 Polarization-separated, phase-shifted interferometer

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
January 10, 2022
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Date of Patent
June 4, 2024
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Patent Application Number
17572353
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Patent Citations
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US Patent 10422624 Optical system, optical device, and program
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US Patent 9746316 High-resolution in-line metrology for roll-to-roll processing operations
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US Patent 9857169 Single-step interferometric radius-of-curvature measurements utilizing short-coherence sources
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US Patent 7057737 Common optical-path testing of high-numerical-aperture wavefronts
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US Patent 7079251 Calibration and error correction in multi-channel imaging
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US Patent 7230717 Pixelated phase-mask interferometer
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US Patent 7230718 Simultaneous phase-shifting fizeau interferometer
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US Patent 7317539 Polarizing beam splitter device, interferometer module, lithographic apparatus, and device manufacturing method
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US Patent 7483145 Simultaneous phase shifting module for use in interferometry
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US Patent 7561279 Scanning simultaneous phase-shifting interferometer
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•••
Patent Inventor Names
Joshua Brown
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Noah Gilbert
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12000698
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Patent Primary Examiner
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Michael A Lyons
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CPC Code
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G01B 2290/60
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G01B 2290/70
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G01B 9/02027
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G01B 2290/40
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G01B 9/0201
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G01B 2290/35
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G01B 9/02067
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