Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Piotr Szwaykowski0
Raymond Castonguay0
Date of Patent
July 14, 2009
0Patent Application Number
117705820
Date Filed
June 28, 2007
0Patent Citations Received
Patent Primary Examiner
Patent abstract
An optical measuring apparatus for comprising, in combination, a polarization type interferometer including a polarization type beam splitter in which a polarized beam of light is split into orthogonally polarized reference and test beams, an array of detectors arranged in a line for creating a plurality of phase shifting interferograms, and a scanning device for moving the object in a direction perpendicular to a long axis of the detectors.
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