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US Patent 12002850 Nanosheet-based semiconductor structure with dielectric pillar
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Patent
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Date Filed
August 31, 2021
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Date of Patent
June 4, 2024
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Patent Application Number
17462526
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Patent Citations
US Patent 9997519 Dual channel structures with multiple threshold voltages
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US Patent 9997598 Three-dimensional semiconductor device and method of fabrication
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US Patent 10453850 Three-dimensional semiconductor device including integrated circuit, transistors and transistor components and method of fabrication
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US Patent 10510620 Work function metal patterning for N-P space between active nanostructures
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US Patent 10516064 Multiple width nanosheet devices
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US Patent 10559692 Nanosheet substrate isolation scheme by lattice matched wide bandgap semiconductor
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US Patent 10741641 Dielectric isolation and SiGe channel formation for integration in CMOS nanosheet channel devices
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US Patent 10593673 Nanosheet with single epitaxial stack forming off-set dual material channels for gate-all-around CMOS
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US Patent 10804165 Source and drain isolation for CMOS nanosheet with one block mask
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US Patent 9614056 Methods of forming a tri-gate FinFET device
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•••
Patent Inventor Names
Kangguo Cheng
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Ruilong Xie
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Julien Frougier
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Chanro Park
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Patent Jurisdiction
United States Patent and Trademark Office
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Patent Number
12002850
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Patent Primary Examiner
Dao H Nguyen
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CPC Code
H01L 21/823807
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H01L 21/823878
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H01L 27/092
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H01L 29/775
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H01L 29/66439
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H01L 29/0649
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H01L 29/0673
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B82Y 10/00
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H01L 21/823481
0
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