Is a
Patent attributes
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ching-Yi Chen0
Wei-Yip Loh0
Hung-Hsu Chen0
Chih-Wei Chang0
Date of Patent
June 11, 2024
0Patent Application Number
181634240
Date Filed
February 2, 2023
0Patent Citations
0
...
Patent Primary Examiner
Patent abstract
A nitrogen plasma treatment is used on an adhesion layer of a contact plug. As a result of the nitrogen plasma treatment, nitrogen is incorporated into the adhesion layer. When a contact plug is deposited in the opening, an interlayer of a metal nitride is formed between the contact plug and the adhesion layer. A nitrogen plasma treatment is used on an opening in an insulating layer. As a result of the nitrogen plasma treatment, nitrogen is incorporated into the insulating layer at the opening. When a contact plug is deposited in the opening, an interlayer of a metal nitride is formed between the contact plug and the insulating layer.
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