Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Injo Ok0
Hsueh-Chung Chen0
Mary Claire Silvestre0
Yann Mignot0
Date of Patent
June 11, 2024
0Patent Application Number
174700030
Date Filed
September 9, 2021
0Patent Citations
0
...
Patent Primary Examiner
Patent abstract
A semiconductor structure includes a plurality of conductive lines formed within a dielectric, wherein each of the plurality of conductive lines electrically communicates with a respective contact, a metal layer disposed over each of the plurality of conductive lines, a phase change memory (PCM) element disposed over the metal layer of each of the plurality of conductive lines, and a projection liner encapsulating the PCM element. Spacers directly contact sidewalls of the projection liner and the PCM element includes a GeSbTe (germanium-antimony-tellurium or GST) layer.
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