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US Patent 12014908 Vacuum processing apparatus

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
March 24, 2020
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Date of Patent
June 18, 2024
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Patent Application Number
17277024
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Patent Citations
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US Patent 9385015 Transfer chamber and method for preventing adhesion of particle
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US Patent 10256125 Wafer processing systems including multi-position batch load lock apparatus with temperature control capability
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US Patent 7022613 Reduced cross-contamination between chambers in a semiconductor processing tool
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US Patent 7024266 Substrate processing apparatus, method of controlling substrate, and exposure apparatus
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US Patent 7210246 Methods and systems for handling a workpiece in vacuum-based material handling system
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US Patent 7293950 Universal modular wafer transport system
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US Patent 7422406 Stacked process modules for a semiconductor handling system
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US Patent 7458763 Mid-entry load lock for semiconductor handling system
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US Patent 7769482 Methods and systems for controlling a semiconductor fabrication process
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US Patent 8029226 Semiconductor manufacturing systems
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•••
Patent Inventor Names
Shengnan Yu
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12014908
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Patent Primary Examiner
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Mark C Hageman
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CPC Code
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H01L 21/67201
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