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US Patent 12022751 Method for fabricating molds for lithography by nano-imprinting

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Is a

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Patent attributes

Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Elisa Vianello0

Raluca Tiron0

Gaëlle Chamiot-Maitral0

Date of Patent

June 25, 2024

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Patent Application Number

173244860

Date Filed

May 19, 2021

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Patent Citations

US Patent 7981533 Method for making a master disk for nanoimprinting patterned magnetic recording disks and master disk made by the method

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US Patent 9377683 Imprint template with optically-detectable alignment marks and method for making using block copolymers

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US Patent 9182673 Method for providing a template for a self-assemblable polymer for use in device lithography

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US Patent 9434093 Method of manufacturing master mold

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US Patent 7114938 Lithographic apparatus for molding ultrafine features

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US Patent 7790350 Method and materials for patterning a neutral surface

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Patent Primary Examiner

Timothy Kennedy

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Patent abstract

This method comprises the steps:

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