Is a
Patent attributes
Patent Jurisdiction
Patent Number
Date of Patent
October 3, 2006
Patent Application Number
10351770
Date Filed
January 27, 2003
Patent Citations Received
Patent Primary Examiner
Patent abstract
An apparatus for performing imprint lithography especially useful in creating patterns with ultrafine features on a substrate. The apparatus comprises a substrate having moldable surface carried on a first block, a mold having a molding surface carried on a second block, positioners for moving the first and second blocks relative to each other, a sensor of the relative positions of the blocks and a controller for controlling the relative positions of the blocks.
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