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US Patent 12062553 Method of manufacturing semiconductors using fluid delivery system

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Is a

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Patent attributes

Patent Applicant

Ichor Systems (company)

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Patent Jurisdiction

United States Patent and Trademark Office

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Patent Number

Patent Inventor Names

Randolph Treur0

Todd Mark Cushman0

Haruyuki Kubota0

Phillip Ryan Barros0

Chris Melcer0

Date of Patent

August 13, 2024

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Patent Application Number

174951260

Date Filed

October 6, 2021

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Patent Primary Examiner

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CPC Code

0

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Patent abstract

A method of processing semiconductors using a fluid delivery system is disclosed in which seal inserts are utilized to fluidly connect an active component that bridges two substrate blocks.

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