Is a
Patent attributes
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Yu-Sheng Wang0
Chi-Cheng Hung0
Pei-Wen Wu0
Pei-Shan Chang0
Date of Patent
August 20, 2024
0Patent Application Number
172483580
Date Filed
January 21, 2021
0Patent Citations
Patent Primary Examiner
Patent abstract
In some implementations, one or more semiconductor processing tools may deposit cobalt material within a cavity of the semiconductor device. The one or more semiconductor processing tools may polish an upper surface of the cobalt material. The one or more semiconductor processing tools may perform a hydrogen soak on the semiconductor device. The one or more semiconductor processing tools may deposit tungsten material onto the upper surface of the cobalt material.
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