US Patent 12077858 Tungsten deposition
Patent 12077858 was granted and assigned to Lam Research on September, 2024 by the United States Patent and Trademark Office.
Is a
Current Assignee
Date Filed
August 10, 2020
0
Date of Patent
September 3, 2024
0
Patent Applicant
Patent Application Number
17633562
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Patent Citations
•••
Patent Inventor Names
Novy Tjokro
0
Xiaolan Ba
0
Ruopeng Deng
0
Sema Ermez
0
Pragna Nannapaneni
0
Tianhua Yu
0
Sanjay Gopinath
0
Patent Jurisdiction
Patent Number
Patent Primary Examiner
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