Is a
Patent attributes
Patent Applicant
0
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Ming Xi0
Moris Kori0
Ramanujapuran A. Srinivas0
Jeong Soo Byun0
Alfred W. Mak0
Ashok K. Sinha0
Avgerinos Gelatos0
Frederick C. Wu0
...
Date of Patent
September 6, 2005
0Patent Application Number
102992120
Date Filed
November 18, 2002
0Patent Citations Received
Patent Primary Examiner
Patent abstract
Methods for the deposition of tungsten films are provided. The methods include depositing a nucleation layer by alternatively adsorbing a tungsten precursor and a reducing gas on a substrate, and depositing a bulk layer of tungsten over the nucleation layer.
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