Log in
Sign up
Golden has been acquired by ComplyAdvantage.Read about it here ⟶
‌

US Patent 12087556 Plasma processing apparatus and plasma processing method

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
June 23, 2021
0
Date of Patent
September 10, 2024
0
Patent Application Number
17356195
0
Patent Citations
‌
US Patent 7886690 Plasma source
0
‌
US Patent 7268083 Plasma etching apparatus and plasma etching process
0
‌
US Patent 8636872 Upper electrode and plasma processing apparatus
0
‌
US Patent 6930047 Dry etching apparatus, etching method, and method of forming a wiring
0
‌
US Patent 7195673 Plasma CVD apparatus, and method for forming film and method for forming semiconductor device using the same
0
Patent Inventor Names
Akio Ui
0
Yosuke Sato
0
Hisataka Hayashi
0
Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
0
Patent Number
12087556
0
Patent Primary Examiner
‌
Thomas T Pham
0
CPC Code
‌
H01L 21/3065
0
‌
H01J 37/32577
0

Find more entities like US Patent 12087556 Plasma processing apparatus and plasma processing method

Use the Golden Query Tool to find similar entities by any field in the Knowledge Graph, including industry, location, and more.
Open Query Tool
Access by API
Golden Query Tool
Golden logo