Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Eugene H. Cook0
Marc Steven Weinberg0
William Sawyer0
Jonathan J. Bernstein0
Mirela G. Bancu0
Date of Patent
September 17, 2024
0Patent Application Number
179800450
Date Filed
November 3, 2022
0Patent Citations
Patent Primary Examiner
Patent abstract
Methods for fabricating MEMS tuning fork gyroscope sensor system using silicon wafers. This provides the possibly to avoid glass. The sense plates can be formed in a device layer of a silicon on insulator (SOI) wafer or in a deposited polysilicon layer in a few examples.
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