Is a
Patent attributes
Patent Jurisdiction
Patent Number
Patent Inventor Names
Brian T. Cunningham0
Marc S. Weinberg0
Date of Patent
November 27, 2007
Patent Application Number
11014415
Date Filed
December 16, 2004
Patent Citations Received
Patent Primary Examiner
Patent abstract
A method of fabricating micro-mechanical devices. A mesa is etched in a homogeneous wafer. The wafer is bonded to a patterned substrate with the mesa defining device elements suspended above the substrate. A portion of the wafer is removed until a desired device thickness is achieved. Discrete elements of the device are then formed by performing a structural etch on the remaining wafer material.
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