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US Patent 12113097 Ferroelectric capacitor integrated with logic

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
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Date Filed
November 16, 2022
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Date of Patent
October 8, 2024
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Patent Application Number
18056240
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Patent Citations
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US Patent 7935543 Method of forming PZT ferroelectric capacitors for integrated circuits
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US Patent 8183109 Semiconductor device and method of manufacturing the same
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US Patent 8362533 Semiconductor device including a transistor and a ferroelectric capacitor
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US Patent 11289497 Integration method of ferroelectric memory array
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US Patent 9991270 Semiconductor device and manufacturing method for same
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US Patent 11482528 Pillar capacitor and method of fabricating such
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US Patent 7029925 FeRAM capacitor stack etch
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US Patent 7435683 Apparatus and method for selectively recessing spacers on multi-gate devices
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Patent Inventor Names
Amrita Mathuriya
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Ramamoorthy Ramesh
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Gaurav Thareja
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Sasikanth Manipatruni
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Rajeev Kumar Dokania
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12113097
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Patent Primary Examiner
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Evren Seven
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