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US Patent 12124053 Spectral feature control apparatus

OverviewStructured DataIssuesContributorsActivity
Is a
Patent
Patent
0
Date Filed
December 15, 2022
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Date of Patent
October 22, 2024
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Patent Application Number
18081971
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Patent Citations
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US Patent 7203216 Timing control for two-chamber gas discharge laser system
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US Patent 7366219 Line narrowing module
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US Patent 7382815 Laser spectral engineering for lithographic process
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US Patent 7782922 Excimer laser device operable at high repetition rate and having high band-narrowing efficiency
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US Patent 7822084 Method and apparatus for stabilizing and tuning the bandwidth of laser light
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US Patent 7885309 Laser system
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US Patent 7899095 Laser lithography system with improved bandwidth control
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US Patent 8144739 System method and apparatus for selecting and controlling light source bandwidth
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US Patent 8624209 Controlling spatial properties in an excimer ring amplifier
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US Patent RE45957 Regenerative ring resonator
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•••
Patent Inventor Names
Eric Anders Mason
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Patent Jurisdiction
United States Patent and Trademark Office
United States Patent and Trademark Office
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Patent Number
12124053
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Patent Primary Examiner
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Dawayne Pinkney
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CPC Code
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G03B 27/02
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G03F 7/70291
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G03F 7/70558
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G03F 9/70
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G03F 7/70633
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G03F 7/70575
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G03F 7/7085
0
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G03F 7/70141
0
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G03F 7/70358
0
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G01B 11/27
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•••

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