US Patent 12124172 Lithographic apparatus and ultraviolet radiation control system
Patent 12124172 was granted and assigned to ASML Holding on October, 2024 by the United States Patent and Trademark Office.
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US Patent 12124172 Lithographic apparatus and ultraviolet radiation control system
Article
Patent abstract
The present disclosure provides an ultraviolet radiation control system and a related method for control an ultraviolet radiation in a lithographic apparatus. The ultraviolet radiation control system comprises a housing; a conversion crystal (
Infobox
Is a
Patent Applicant
Current Assignee
Patent Jurisdiction
Patent Number
Patent Inventor Names
Alexander Kremer0
Date of Patent
October 22, 2024
0Patent Application Number
176347020
Date Filed
August 5, 2020
0Patent Citations
Patent Primary Examiner
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